Skip to main content

XY stage

Product Overview

XY Stage is one easy option for users who requires precise motion, true UHV performance, rugged construction which allows mounting in any orientation.  There are two parallel flanges, one to remain fixed while the other to provide the movement. The device works by adjusting the position of the travelling flange in relation to the fixed system mounting flange. Position of the travelling flange is controlled through two micrometers.

The welded bellow allows the flanges to accommodate the required motion while ensuring an all-metal vacuum enclosure.

Specification

  • Working Pressure: 10-11 mbar~1 bar
  • Manual Actuator
  • Bakeable to 150℃
  • Welded Bellows Seal with SS 316
  • Micrometer with 10μm Resolution
  • Mounting flange on both sides: CF35, tapped hole
Flange OD XY Movement A B C D E Weight(Kg) Part Number
mm inch mm
70 2.75 ±7 229 271 38 93 67 4.3 XY35