All product specifications and data are for reference only. For detailed information or to confirm performance specifications, please refer to official quotation.
Medium XYZ Stage
Product Overview
Medium XYZ stage, which is of precision and operability, provide X,Y and Z movement . X/Y direction adopts crossed roller bearing and ball screw structure, which make the stage strong and compact in structure. Meanwhile the Z direction adopts the combination structure of plain shaft and ball screw.
It is designed as a module with a wide range of optional configurations. Please contact for more information.
Specification
- Working Pressure：10-11mbar~1 bar
- Bakeable to 120℃
- Welded Bellows Seal with SS 316
- Clear Bore up to 65mm
- Top mounting flange: CF flange, clear hole or tapped hole
- Bottom mounting flange: CF flange, tapped hole
- X/Y driver: Step motor with 10μm or micrometer with10μm
- Z driver: Step motor with 10μm + handwheel
- minimum flange to flange(compressed) distance is 298.5mm
| A Flange OD | B Flange OD | XY Movement | Z Movement | ||
| mm | inch | mm | inch | mm | |
| 114 | 4.5 | 114 | 4.5 | ±7.5 | Up to 200 |