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Linear Translator with Port Aligner

Product Overview

Based on Standard LTM series, Linear Translator with Port Aligner integrates an port aligner that allows the moving flange to be tilted ±3° for final alignment. It is typically used on beamlines to align diagnostics or for ion/sputter source alignment.
Adjustment is actuated via three threaded support shafts. All flanges in the series are supplied with tapped bolt holes on the base flange as standard.
Standard version comes with manual actuator and if you need motor driven, please contact Fermi.

Specification

  • Working Pressure: 10-11mbar~1bar
  • Bakeable to 150°C
  • Welded Bellows Seal with SS 316
  • Tapped Flanges on Both Sides
  • Angular tilt: ±3°
  • Etched Scale in 1mm Increments
Flange OD Axial Adjustments A Extended A Compressed C Weight(Kg) Part Number
mm inch 毫米
70 2.75 75 163 88 38 2.7 LPA35L75M
100 197 97 38 5.0 LPA35L100M
150 257 107 38 7.3 LPA35L150M