All product specifications and data are for reference only. For detailed information or to confirm performance specifications, please refer to official quotation.
High-precision Full-scale XYZ Stage
Product Overview
High-precision full-scale XYZ stage with the welded bellows provides X, Y and Z movements. This series adopts linear slider and high precision ball screw, which is strong and compact in structure.
With servo motor and grating ruler, sub-micron precision can be achieved, and the stage can be matched with high precision DPRF.
It is designed as a module with a wide range of optional configurations. Please contact for more information.
Specification
- Working Pressure：10-11mbar~1 bar
- Bakeable to 120℃ (just bellow)
- Welded Bellows Seal with SS 316
- Clear Bore up to 102mm
- Servo motor driver
- linear slider and high precision ball screw
- Optical Encoder
- Resolution: 0.2μm
- Top mounting flange: CF100, clear hole
- Bottom mounting flange: CF150, clear hole
- minimum flange to flange(compressed)distance is 410.5mm
| A Flange OD | B Flange OD | XY Movement | Z Movement | ||
| mm | inch | mm | inch | mm | |
| 152 | 6 | 203 | 8 | ±12.5 | Up to 650 |