High-precision Differential Pumped Rotary Feedthrough has improved the precision and rigidity of compact differentially pumped rotary feedthrough by using high-precision crossed roller bearing.
The bearing can be mounted directly to rotary and stationary stages without any fixing plates and housing. As a result, it is possible to increase the thickness of the bearing or the size of the rolling elements in the bearing, while the feedthrough performance is almost entirely unaffected by the installation of the bearing. Thus, in the compact space it is allowed to install a precise optical encoder, which can provide position feedback together with a worm gear system driven by a servo motor, so the feedthrough can be controlled with extremely high precision. The larger ball bearings improve the rigidity of the UHV rotary drive.