All product specifications and data are for reference only. For detailed information or to confirm performance specifications, please refer to official quotation.
Full-size XYZ Stage
Product Overview
The Full-Size XYZ stage, which is of precision and operability, provide X,Y and Z movement . The X/Y direction adopts plain shaft and micrometer, while the Z direction adopts the combination structure of plain shaft and ball screw.
It is designed as a module with a wide range of optional configurations. Please contact for more information.
Specification
- Working Pressure：10-11mbar~1 bar
- Bakeable to 120℃
- Welded Bellows Seal with SS 316
- Clear Bore up to 102mm
- Top mounting flange: CF flange, clear hole
- Bottom mounting flange: CF flange, tapped hole
- X/Y driver: Step motor with 10μm + micrometer
- Z driver: Step motor with 10μm
- minimum flange to flange(compressed) distance is 300mm
| A Flange OD | B Flange OD | XY Movement | Z Movement | ||
| mm | inch | mm | inch | mm | |
| 152 | 6 | 203 | 8 | ±12.5 | Up to 650 |