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Compact Differentially Pumped Rotary Feedthrough

Product Overview

Compact Differentially Pumped Rotary Feedthrough is sealed at the side, which keeps the structure more compact, which is suitable for application with restricted dimensions. Meanwhile, it still meet the requirements of UHV applications.
The feedthrough could be used for the applications including sample surface analysis (XPS, AES or SIMS), ion/neutral/atom scattering experiments, etc.

Specification

  • Manual/ Step Motor Actuator
  • Cross Roller Bearings
  • Bakeable to 150℃
  • Rotation range: 360° continuous
  • One stage Differential pumping for UHV Performance
  • Mounting flange on both sides: CF flange, tapped hole
Flange OD Actuation A B C D Resolution Weight(Kg) Part Number
mm inch mm inch mm inch mm inch mm inch
70 2.75 Manual 99 3.9 82 3.23 81 3.19 35 1.38 1.7 CDPRF35M
114 4.5 Manual 239 9.41 153 9.96 92 3.62 63 2.48 4.8 CDPRF63M
Step Motor 0.01° 5.3 CDPRF63A
152 6 Manual 281 11.1 190 7.48 96 3.78 103 4.06 7 CDPRF100M
Step Motor 0.01° 7.5 CDPRF100A