High Temperature Evaporator is designed for clean UHV operation up to 2000°C. The concept of ceramic support heating element is no longer valid here as: Most ceramic is semiconducting at such high temperature thus insulating is difficult; PBN decompose significantly above 1500 °C.
To overcome these issues, one self-standing filament is manufactured which is the key point for this high temperature evaporator. With this free-standing filament of thick tungsten wire, ultimately it is capable of reaching even 2000°C.
To prevent the flange from being heated by the radiation of the heating element and also cool the electrode during max power operation, one internal water cooling stage is included with high temperature evaporator. Meanwhile, external water cooling shroud is also recommended to prevent the chamber from being heated up.