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E-Beam Evaporators

Product Overview

Effusion Cells with different configurations have proven their capability in evaporating most elements in a controllable and stable manner. However, there are certain limits on the effusion cells with the wired filament design, for which the highest temperature one could achieve is around 2000 ℃. This is still below the evaporating point of many refractory metals such as Ta, Mo, etc.
E-Beam Evaporators pushed the highest working temperature to around 3000 ℃ by electron bombardment from the surrounding filament to a rod form material or crucibles.
The heated zone is enclosed in a water-cooled copper shroud which keeps the degassing at a very low level. By tuning the input power from 0 to 300W, flux control from <0.1Å/min to >50Å/min can be achieved for many materials. A 50mm travel linear translator is equipped with the evaporator to support the movement of rod material and guarantee the rod tip always in the optimized position.

Specification

● Part Number:E38EB

● Filament Current: 4.5 A (Max. 5 A)

● High Voltage (Max): 2 KV
● Emission Current: 200 mA (Max. 300 mA)
● PID control with flux feedback
● Source (optional): Rod (Diameter: 2.5 mm ~ 6 mm; feed length: 50mm) / Crucible (0.25 cc)
● Flange Size: DN38CF (O.D. 2.75”)
● Bakeout Temperature: 150 ℃
● Internal Water Cooling
● Shutter: Optional (Manual/Pneumatic)