All product specifications and data are for reference only. For detailed information or to confirm performance specifications, please refer to official quotation.
5-axis LN MBE Manipulator
Product Overview
The 5-axis LN MBE manipulator can provide the sample translational in X, Y and Z directions, the Polar rotation (R1) and Azimuthal rotation (R3). X、Y、Z、R1 are realized by the XYZ-R1 stage, R3 is realized by the gear transmission structure of the sample stage. LN2 cooling module ensure the temperature of sample stage up to 120K, Unique filament heating structure ensures the temperature of sample holder up to 1000K. It is mainly composed of three parts: manipulator, temperature control system and XYZ-R1 stage. The entire manipulator and XYZ-R1 stage are made of non-magnetic materials, which can be used in ultra-high vacuum.
Highlights
● Lowest temperature: 120K
● Highest temperature: 1000K (Radiation heating) ; 1200K(E-beam heating)
● Multi-axis: X、Y、Z、R1、R3
● Temperature stability: 0.1K with PID control
● Options available
● Highest temperature: 1000K (Radiation heating) ; 1200K(E-beam heating)
● Multi-axis: X、Y、Z、R1、R3
● Temperature stability: 0.1K with PID control
● Options available
Mechanical Specifications
| Polar rotation | ±179° |
| X/Y stroke | 25mm(±12.5mm) |
| Z stroke | Up to 300mm |
| Azimuthal | 25mm（360° |
Options
● E-beam heating
● Heater switch
● Infrared thermometer
● Heater switch
● Infrared thermometer