All product specifications and data are for reference only. For detailed information or to confirm performance specifications, please refer to official quotation.
2-axis MASK Manipulator
Highlights
● Heating filament: SIC
● Highest temperature: 1200K
● Multi-axis: Z、R1
● Temperature stability: 0.1K with PID control
● MASK compatible
● Re-orientation accuracy: 2 μm
● Rotation angle: 0°，90°180°，270°
● Highest temperature: 1200K
● Multi-axis: Z、R1
● Temperature stability: 0.1K with PID control
● MASK compatible
● Re-orientation accuracy: 2 μm
● Rotation angle: 0°，90°180°，270°
Mechanical Specifications
| Polar rotation | 360° |
| Z stroke | 75mm |