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High Purity Gas Flow Control Panel

Product Overview

Fermion designed a multi-gas circuit panel to provide high-purity ultraviolet light source working gases better than 100ppt, including He, Ne, Ar, Kr, Xe… and other working gases to improve photon resolution and extend the use of the lamp head life.

Highlights

  • Precision gas flow control: 0.1sccm-10sccm
  • Purity: the purity of the purified gas is better than 100ppt
  • Multiple gas switching
  • All-metal VCR ultra-high purity gas circuit standard design