All product specifications and data are for reference only. For detailed information or to confirm performance specifications, please refer to official quotation.
High temperature manipulator for 3 inch sample
Product Overview
- Mounting Flange: DN 350CF
- Substrate size: 3 inch
- Heater: Silicon Carbide(SiC)
- Sensor: Thermocouple type K
- Temperature range: RT-1000℃
- Z-axis travel: 50mm
- Customized insertion length
- Application area：Thermal Evaporation, Pulsed Laser Deposition, Magnetron Sputtering
Options
- Manual/ pneumatic shutter
- Water jacket
- Sensor: Thermocouple type K or C
- Z-axis travel: up to 250mm, manual/motor control
- DPRF: ±180°, manual/motor control