All product specifications and data are for reference only. For detailed information or to confirm performance specifications, please refer to official quotation.
Compact XYZ Stage
Product Overview
Compact XYZ stage, with a compact structure, can provide precise motion and manipulation of samples inside UHV environments. The X/Y direction is controlled by micrometers, while the Z direction is driven by lead screw, which makes the operation more stable. Welded stainless steel bellows is used to allow the CF35 moving flange to travel within a limited range. There are optional bottom mounting flanges, NW35CF or NW63CF flanges.
Specification
- Working Pressure：10-11 mbar~1 bar
- Manual Actuator
- Bakeable to 150℃
- Welded Bellows Seal with SS 316
- Micrometer with 10um Resolution
- Z-motion scale in 1mm increment
- Top mounting flange: CF35, tapped hole
- Bottom mounting flange: CF63, clear hole
| Flange OD | XY Movement | Z Movement | A Compressed | A Extended | Weight（Kg) | Part Number | |
| mm | inch | mm | |||||
| 70 | 2.75 | ±12.5 | 75 | 165 | 240 | 10.2 | SXYZ63Z75 |
| 100 | 165 | 265 | 10.5 | SXYZ63Z100 | |||
| 150 | 165 | 315 | 10.9 | SXYZ63Z150 | |||