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Compact XYZ Stage

Product Overview

Compact XYZ stage, with a compact structure, can provide precise motion and manipulation of samples inside UHV environments. The X/Y direction is controlled by micrometers, while the Z direction is driven by lead screw, which makes the operation more stable. Welded stainless steel bellows is used to allow the CF35 moving flange to travel within a limited range. There are optional bottom mounting flanges, NW35CF or NW63CF flanges.

Specification

  • Working Pressure:10-11 mbar~1 bar
  • Manual Actuator
  • Bakeable to 150℃
  • Welded Bellows Seal with SS 316
  • Micrometer with 10um Resolution
  • Z-motion scale in 1mm increment
  • Top mounting flange: CF35, tapped hole
  • Bottom mounting flange: CF63, clear hole
Flange OD XY Movement Z Movement A Compressed A Extended Weight(Kg) Part Number
mm inch mm
70 2.75 ±12.5 75 165 240 10.2 SXYZ63Z75
100 165 265 10.5 SXYZ63Z100
150 165 315 10.9 SXYZ63Z150