All product specifications and data are for reference only. For detailed information or to confirm performance specifications, please refer to official quotation.
5-axis MBE Manipulator
Product Overview
The 5-axis MBE manipulator can provide the sample translational in X, Y and Z directions, the Polar rotation (R1) and Azimuthal rotation (R3). X、Y、Z、R1 are realized by the XYZ-R1 stage, R3 is realized by the gear transmission structure of the sample stage. Unique filament heating structure ensures the temperature of sample holder up to 1200K. It is mainly composed of three parts: manipulator, temperature control system and XYZ-R1 stage. The entire manipulator and XYZ-R1 stage are made of non-magnetic materials, which can be used in ultra-high vacuum.
Highlights
● Highest temperature: 1200K (Radiation heating) ; 1500K(E-beam heating)
● Multi-axis: X、Y、Z、R1、R3
● Temperature stability: 0.1K with PID control
● Options available
● Multi-axis: X、Y、Z、R1、R3
● Temperature stability: 0.1K with PID control
● Options available
Mechanical Specifications
| Polar rotation | ±179° |
| X/Y stroke | ±12.5mm |
| Z stroke | Up to 300 mm |
| Azimuthal | 25mm（360° |
Options
● LN2 cooling module
● E-beam heating
● Heater switch
● Infrared thermometer
● E-beam heating
● Heater switch
● Infrared thermometer