All product specifications and data are for reference only. For detailed information or to confirm performance specifications, please refer to official quotation.
4-axis LN MBE Manipulator
Product Overview
The 4-axis LN MBE manipulator provide the sample translational in X, Y and Z directions and the rotation R1(Polar). LN2 cooling module ensures the lowest temperature of the sample stage can reach 80K. Unique filament heating structure ensures the temperature of sample holder up to 1200K. It is mainly composed of three parts: manipulator, temperature control system and XYZ-R1 stage. The entire manipulator and XYZ-R1 stage are made of non-magnetic materials, which can be used in ultra-high vacuum.
Highlights
● Lowest temperature:90K
● Highest temperature: 1200K (radiation heating ),1500K(E-beam heating)
● Multi-axis: X、Y、Z、R1
● Temperature stability: 0.1K with PID control
● Options available
Mechanical Specifications
Polar rotation | ±179° |
X/Y stroke | ±12.5mm |
Z stroke | Up to 300mm |
Options
● E-beam heating
● Shutter
● Heater switch
● Infrared thermometer
● Shutter
● Heater switch
● Infrared thermometer