All product specifications and data are for reference only. For detailed information or to confirm performance specifications, please refer to official quotation.
4-axis MBE Manipulator
Product Overview
The 4-axis MBE manipulator provide the sample translational in X, Y and Z directions and the rotation R1(Polar). Unique filament heating structure ensures the temperature of sample holder up to 1200K. It is mainly composed of three parts: manipulator, temperature control system and XYZ-R1 stage. The entire manipulator and XYZ-R1 stage are made of non-magnetic materials, which can be used in ultra-high vacuum.
Highlights
● Highest temperature: 1200K (radiation heating )，1500K(E-beam heating)
● Multi-axis: X、Y、Z、R1
● Temperature stability: 0.1K with PID control
● Options available
Mechanical Specifications
| Polar rotation | ±179° |
| X/Y stroke | 15mm(±7.5mm) |
| Z stroke | Up to 300 mm |
Options
- Sample parking stage
- Secondary Low Temperature Sample Stage
- High Temperature Stage (E-beam optional)
- YAG Stage
- Sample Floating Module
- Low Temperature Cleavage Module
- Four-probe Transport Measurement Module