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Differentially Pumped Rotary Feedthrough

Product Overview

Differentially Pumped Rotary Feedthrough allows two flanges to rotate concentricly, which can be used as a modular component for constructing UHV multi-axis manipulators. It provides primary rotation for other components and achieve 360° continuous rotation.
The feedthrough could be used for the applications including sample surface analysis (XPS, AES or SIMS), ion/neutral/atom scattering experiments, etc.

Specification

  • Manual/ Step Motor Actuator
  • Precision Ball Bearings and Quality PTFE
  • Rotation range: 360° continuous
  • Bakeable to 150℃
  • Laser Etched Scale in 1° Increments
  • Two Stage Differential Pumping for UHV Performance
  • Mounting flange on both sides: CF flange, tapped hole
Flange OD Actuation Resolution Weight(Kg) Part Number
mm inch
114 4.5 Manual 0.1° 4.5 DPRF63M
Step Motor 0.01° 6.1 DPRF63A
152 6 Manual 0.1° 9.2 DPRF100M
Step Motor 0.01° 11.0 DPRF100A