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Hollow Shaft Magnetic Coupled Rotary Feedthrough

Product Overview

Hollow Shaft Magnetic Coupled Rotary Feedthrough has a rotatable internal hollow shaft, and each drive terminates with a CF flange at the rear enabling services such as electric, fluid or an extra motion to be passed through the drive.
The rotary feedthrough is designed to carry heavy load on the hollow shaft.

Specification

  • Magnetic Coupling
  • UHV Rated to 10-11 mbar
  • Bakeable to 150℃
  • Rotation range: 360° continuous
  • Laser Etched Scale in 1° Increments
  • UHV Compatible materials
  • No backlash under low load
  • Top mounting flange: CF flange, tapped hole
  • Bottom mounting flange: CF flange, clear hole
Flange OD Actuation Resolution Weight (Kg) Part Number
mm inch
70 2.75 Manual 3.0 HSR35M
Step Motor 0.1° 5.0 HSR35A
114 4.5 Manual 1° 6.9 HSR63M
Step Motor 0.1° 8.0 HSR63A